The PAS 5500/1150C is capable of producing wafers at a resolution of ≤ 90 nm with a wavelength of 193 nm, according to THIS DOCUMENT. It’s a machine from the 90s and gets support through 2035.

I don’t know what the actual requirements are for printing more modern chips and wafers, though.

Do you think there is much margin to be had with the more recent machines, as in cost vs benefit? There are no import restrictions in my case, for the record.

EDIT:

I did some digging and probably the answer is “NO” because the first 1GB DDR5 from Hynix was ≤ 50 nm and more modern chips use ≤ 20 nm, while I can’t find anything confirming lower resolutions can’t I doubt any current plans exist for it.